Chang Liu
Nanoscale biological imaging via extreme ultraviolet ptychography
Dissertation
Friedrich-Schiller-Universität Jena (June 2026)
Nanoscale biological imaging via extreme ultraviolet ptychography
Dissertation
Friedrich-Schiller-Universität Jena (June 2026)
Abstract:
Ptychographic imaging based on HHG in the EUV spectral range enables spatial resolutions approaching the illumination wavelength while providing quantitative, label-free imaging capabilities on a laboratory scale [72, 152, 243]. Despite these advantages, the application of EUV ptychography to biological specimens remains challenging, as such samples are typically structurally fragile, highly radiation-sensitive, and weakly scattering. This dissertation presents the development, implementation, and quantitative evaluation of a compact EUV ptychographic microscope driven by a fiber-laser-based HHG source operating at a wavelength of 13.5nm (Section 3.1). A central methodological contribution is a novel purity-based approach for axial distance calibration in ptychography, which enables robust determination of the object–detector distance under partially coherent illumination and significantly improves the quantitative reliability of reconstructed images (Chapter 4). In addition, a correlative multi-wavelength imaging concept was realized to enable efficient navigation and enhanced experimental stability within a single compact microscope platform(Section 3.2). Building on these methodological advances, the developed system was successfully applied for the first time to quantitative EUV imaging of biological specimens with sub-50nm spatial resolution. Studies on eukaryotic microorganisms and bacterial model systems yielded detailed morphological and compositional information. By combining thesemeasurements with multivariate statistical analysis, quantitative nanoscale phenotyping of biological specimens was achieved. In particular, the analysis of antibiotic-induced structural changes in Bacillus subtilis demonstrates the potential of EUV ptychography for quantitative and statistically robust biological investigations. Furthermore, this work presents a quantitative analysis of dose-limited resolution for biologically relevant cellular models. By explicitly accounting for material-dependent contrast mechanisms in XDM, together with an established dose–resolution framework, the required radiation doses for imaging hydrated and dehydrated cellular states are systematically compared. The results identify an EUV energy window with particularly efficient protein contrast, enabling high-resolution quantitative imaging of dehydrated biological specimens at substantially reduced dose. These findings provide quantitative design guidelines for future EUV and SXR microscopy. In summary, this work demonstrates that HHG-based EUV ptychography enables quantitative, label-free nanoscale imaging of biological specimens on a laboratory scale, providing a practical and versatile framework for future biological imaging.